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Measurement of Magnetic Field and Hall Current Modeling in Discharge of Magnetron Sputtering System

机译：磁控溅射系统放电中磁场和霍尔电流模型的测量

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D. V. Duhopel'nikov;
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年度 2015
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1. Measurement of the magnetic field change in a pulsed high current magnetron discharge [J] . Bohlmark J, Helmersson U, VanZeeland M, Plasma Sources Science & Technology . 2004,第4期

机译：脉冲大电流磁控管放电中磁场变化的测量
2. Discharge characteristics of electronegative Mg-CF_4 direct current magnetron sputtering by probe measurements [J] . Eiji Kusano Journal of Applied Physics . 2021,第23期

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3. Synergistic enhancement effect between external electric and magnetic fields during high power impulse magnetron sputtering discharge [J] . Li Chunwei, Tian Xiubo, Gong Chunzhi, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2017,第期

机译：高功率脉冲磁控溅射放电过程中外电和磁场之间的协同增强效果
4. Magnetic Field Effect on Pre-Sheath Dynamics in a High Power Impulse Magnetron Sputtering (HiPIMS) Discharge [C] . A. Mishra, P.J. Kelly, J.W. Bradley Society of Vacuum Coaters annual technical conference . 2011

机译：磁场对大功率脉冲磁控溅射（HiPIMS）放电中鞘前动力学的影响
5. Modeling equatorial ionospheric currents and electric fields from satellite magnetic field measurements [D] . Alken, Patrick 2009

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6. Design and Realization of a Three Degrees of Freedom Displacement Measurement System Composed of Hall Sensors Based on Magnetic Field Fitting by an Elliptic Function [O] . Bo Zhao, Lei Wang, Jiu-Bin Tan 2015

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7. Current driven second harmonic domain wall resonance in ferromagnetic metal/ nonmagnetic metal bilayer: a field-free method for spin Hall angle measurements [O] . Hajiali, M. R., Hamdi, M., Roozmeh, S. E., 2017

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8. Measurements and theoretical interpretation of hall currents for steady axial discharges in radial magnetic fields [R] . Brockman, P., Hess, R. V., Weinstein, R. 1963

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Measurement of Magnetic Field and Hall Current Modeling in Discharge of Magnetron Sputtering System

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